Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano: Difference between revisions
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== Etching of nanostructures in silicon == | == Etching of nanostructures in silicon == | ||
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A series of experiments with etching nanostructures in silicon has been carried out. The common process parameters are: | A series of experiments with etching nanostructures in silicon has been carried out. The common process parameters are: | ||