Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
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= Modification of showerhead on Pegasus 1 in december 2014 = | = Modification of showerhead on Pegasus 1 in december 2014 = | ||
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This page describes why the showerhead has been changed and what process changes have been found. SPTS calls this modification the 'High Flow Plenum upgrade'. | This page describes why the showerhead has been changed and what process changes have been found. SPTS calls this modification the 'High Flow Plenum upgrade'. | ||