Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions
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PEC is calculated based on a Point Spread Function (PSF). The PSF is a model of the radial electron energy density received by the resist around the incident beam. | PEC is calculated based on a Point Spread Function (PSF). The PSF is a model of the radial electron energy density received by the resist around the incident beam. | ||
[[File:BeamerPSF.png|600px|center|frameless]] | |||
== Pattern fracturing == | == Pattern fracturing == | ||
== Field sorting == | == Field sorting == | ||
== Export for writing == | == Export for writing == | ||