Specific Process Knowledge/Characterization/XRD/Process Info: Difference between revisions
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</gallery> | </gallery> | ||
=RSM (Reciprocal Space Map) measurements= | ==RSM (Reciprocal Space Map) measurements== | ||
<gallery caption="XPS recordings. 10 nm SiC deposited on Si wafer" widths="1300px" heights="500px" perrow="1"> | <gallery caption="XPS recordings. 10 nm SiC deposited on Si wafer" widths="1300px" heights="500px" perrow="1"> | ||
image:eves_RSM_scan_concept_20230131.png|<b>C 1s</b> signal. | image:eves_RSM_scan_concept_20230131.png|<b>C 1s</b> signal. | ||