Specific Process Knowledge/Thin film deposition/Deposition of Ruthenium: Difference between revisions
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== Deposition of Ru == | == Deposition of Ru == | ||
Ruthenium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment: | Ruthenium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment: | ||