Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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! Colspan="2" style="background:silver; color:black;" align="center"|Specifics | ! Colspan="2" style="background:silver; color:black;" align="center"|Specifics | ||
|style="background:LightgGrey; color:black;" align="center"|<b>Allowed</b> | |style="background:LightgGrey; color:black;" align="center"|<b>Allowed</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Comments</b> | |style="background:WhiteSmoke; color:black;" align="center"|<b>Comments</b> | ||
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!style="background:silver; color:black" align="center" | !style="background:silver; color:black" align="center" align="center" rowspan="1"|Temperature | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* up to 1250 <sup>o</sup>C | * up to 1250 <sup>o</sup>C | ||
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!style="background:silver; color:black" align="center" | !style="background:silver; color:black" align="center" align="center" rowspan="4"|Process gas | ||
|style="background:LightGrey; color:black"|Ar | |style="background:LightGrey; color:black"|Ar | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||