Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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More information and details about each type of processing - achievable using the RTP Annealsys tool - can be found in the following documents. | More information and details about each type of processing - achievable using the RTP Annealsys tool - can be found in the following documents. | ||
*[[media:Report_Annealsys_2022.pdf|Report_Annealsys_December22 by Inês Diogo@DTU Nanolab]] | *[[media:Report_Annealsys_2022.pdf|Report_Annealsys_December22 by Inês Diogo@DTU Nanolab]] | ||
*[[media:Dissertation_ID_Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features.pdf|Rapid Thermal Annealing and its Effects on High Aspect Ratio Silicon Features_MasterThesis_ID by Inês Diogo@DTU Nanolab]] | *[[media:Dissertation_ID_Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features.pdf|Rapid Thermal Annealing and its Effects on High Aspect Ratio Silicon Features_MasterThesis_ID by Inês Diogo@DTU Nanolab]] | ||
'''''Important!''''' The '''''RTO sequences''''' that were developed during the previous experimental work on the RTP Annealsys are '''''not available to users'''''. More tests and further investigation are required to prevent damaging the tool. | |||
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process/RTP_Annealsys click here]''' | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process/RTP_Annealsys click here]''' | ||