Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch): Difference between revisions
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[[Category: Equipment|Etch AOE]] | [[Category: Equipment|Etch AOE]] | ||
[[Category: Etch (Dry) Equipment|AOE]] | [[Category: Etch (Dry) Equipment|AOE]] | ||
''This page is written by DTU Nanolab internals if nothing else is stated'' <br> | |||
== Etching using the dry etch technique AOE (Advanced oxide etch) == | == Etching using the dry etch technique AOE (Advanced oxide etch) == | ||