Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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{| border="1" style="text-align: center; width: | {| border="1" style="text-align: center; width: 1000px; height: 200px" | ||
|+ '''Samples profile before going for the ORE process:''' | |+ '''Samples profile before going for the ORE process:''' | ||
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