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| ==Tencor stylus profiler==
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| [[image:TencorP1.jpg|275x275px|right|thumb|Tencor: positioned in cleanroom 4 - glass cage no. 3]]
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| Tencor P1 stylus profiler is a product of KLA-Tencor Corporation. It is usable for profiling surfaces of samples with structures in the micrometer range. It can measure in a specific point found with help from a high magnification video camera. It can also be used for stress measurements of thin films by measuring the wafer bow.
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| It is a very old system and should be treated with care.
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