Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions
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[[Category: Equipment|Thin film PECVD]] | [[Category: Equipment|Thin film PECVD]] | ||
[[Category: Thin Film Deposition|PECVD]] | [[Category: Thin Film Deposition|PECVD]] | ||
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==PECVD Plasma Enhanced Chemical Vapor Deposition== | ==PECVD Plasma Enhanced Chemical Vapor Deposition== | ||
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All though PECVD4 and 3 are very similar you should not expect to transfer a recipe between the systems and get the exact same result. | All though PECVD4 and 3 are very similar you should not expect to transfer a recipe between the systems and get the exact same result. | ||
'''The user manuals, quality control procedures and results, user APVs, technical information and contact information can be found in LabManager:''' | '''The user manuals, quality control procedures and results, user APVs, technical information and contact information can be found in LabManager (requires login):''' | ||
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