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| ===Overview of the performance of Tencor P1 stylus profiler===
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| {| border="2" cellspacing="0" cellpadding="10"
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| !style="background:silver; color:black;" align="left"|Purpose
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| |style="background:LightGrey; color:black"|Profiler for measuring micro structures. ||style="background:WhiteSmoke; color:black"|
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| *Single point profiles
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| *Stress measurements by measuring wafer bow
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| *Surface roughness on a line scan
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| |-
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| !style="background:silver; color:black" align="left"|Performance
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| |style="background:LightGrey; color:black"|Scan range xy||style="background:WhiteSmoke; color:black"|
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| Line scan x: Full substrate size
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Scan range z
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| |style="background:WhiteSmoke; color:black"|
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| <100 Å to ~0.3 mm
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| |-
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Resolution xy
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| |style="background:WhiteSmoke; color:black"|
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| up to 5900 data points per profile
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Resolution z
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| |style="background:WhiteSmoke; color:black"|
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| 1Å or 25Å
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| |-
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W
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| |style="background:WhiteSmoke; color:black"|
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| 0.87(W[µm]-5µm)
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| |-
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| !style="background:silver; color:black" align="left"|Hardware settings
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| |style="background:LightGrey; color:black"|Tip radius
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| |style="background:WhiteSmoke; color:black"|
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| *5 µm 60<sup>o</sup> cone
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| !style="background:silver; color:black" align="left"|Substrates
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| |style="background:LightGrey; color:black"|Substrate size
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| |style="background:WhiteSmoke; color:black"|
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| *up to 4"
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| |-
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| |style="background:silver; color:black"|
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| | style="background:LightGrey; color:black"|Substrate material allowed
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| |style="background:WhiteSmoke; color:black"|
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| *In principle all materials
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| |-
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| |}
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| ==Comparing the profilers== | | ==Comparing the profilers== |
| Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | | Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. |
