Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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After the Al<sub>2</sub>O<sub>3</sub> etch, pillars were: | After the Al<sub>2</sub>O<sub>3</sub> etch, pillars were: | ||
{| border="1" style="text-align: center; width: 900px; height: 200px" | |||
|+ '''Samples profile before going for the ORE process:''' | |||
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|-style="background:LightGray; color:Black" | |||
! !! After Al<sub>2</sub>O<sub>3</sub> etch !! After BARC etch | |||
|- | |||
| '''O-step''' || 10 || 220 mTorr | |||
|- | |||
| '''R-step''' || 10 || 100% | |||
|- | |||
| '''E<sub>1</sub>-step''' || 2 || 220 mTorr | |||
|- | |||
| '''E<sub>2</sub>-step''' || 1-5 || 220 mTorr | |||
|} | |||