Jump to content

Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions

Mfarin (talk | contribs)
Mfarin (talk | contribs)
Line 80: Line 80:
Photo: Maria Farinha @DTU Nanolab, April 2022''''']]
Photo: Maria Farinha @DTU Nanolab, April 2022''''']]
{| border="1" style="text-align: center; width: 650px; height: 200px"
{| border="1" style="text-align: center; width: 650px; height: 200px"
|+ 200nm nanoholes recipe
|+ '''200nm nanoholes recipe'''
|-
|-
|-style="background:LightGray; color:Black"
|-style="background:LightGray; color:Black"
Line 100: Line 100:
Photo: Maria Farinha @DTU Nanolab, July 2022''''']]
Photo: Maria Farinha @DTU Nanolab, July 2022''''']]
{| border="1" style="text-align: center; width: 650px; height: 200px"
{| border="1" style="text-align: center; width: 650px; height: 200px"
|+ 200nm nanoholes recipe
|+ '''200nm nanoholes recipe'''
|-
|-
|-style="background:LightGray; color:Black"
|-style="background:LightGray; color:Black"