Specific Process Knowledge/Characterization/XPS/NexsaOverview: Difference between revisions

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| align="center" style="background:#f0f0f0;" |'''Type'''
| align="center" style="background:#f0f0f0;" |'''Type'''
| align="center" style="background:#f0f0f0;"|'''Author'''
| align="center" style="background:#f0f0f0;"|'''Author'''
| align="center" style="background:#f0f0f0;"|'''Web of Science'''
| align="center" style="background:#f0f0f0;"|'''Link'''
| align="center" style="background:#f0f0f0;" |'''XPS'''
| align="center" style="background:#f0f0f0;" |'''XPS'''
| align="center" style="background:#f0f0f0;" |'''UPS'''
| align="center" style="background:#f0f0f0;" |'''UPS'''
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| [[media:AN52476-confirming-layer-structure-organic-fet-device.pdf | Confirming the layer structure of an organic FET device]]||Application note||P Mack ||||X||||||||||MAGCIS||Organic FET's,||
| [[media:AN52476-confirming-layer-structure-organic-fet-device.pdf | Confirming the layer structure of an organic FET device]]||Application note||P Mack ||||X||||||||||MAGCIS||Organic FET's,||
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| [[media:Bare-2016-Surface-analysis-of-zeolites-an-xps.pdf |Surface analysis of zeolites: An XPS, variable kinetic energy XPS, and low energy ion scattering study]]||Publication||SR Bare||[http://apps.webofknowledge.com.proxy.findit.dtu.dk/CitedFullRecord.do?product=WOS&colName=WOS&SID=F6P8vdNQigRKywglhCq&search_mode=CitedFullRecord&isickref=WOS:000374198600054 link]||X||||X||||||||Zeolites, Metal oxides||<span title="The surface Si/Al ratio in a series of zeolite Y samples has been obtained using laboratory XPS, synchrotron (variable kinetic energy) XPS, and low energy ion scattering (LEIS) spectroscopy. The non-destructive depth profile obtained using variable kinetic energy XPS is compared to that from the destructive argon ion bombardment depth profile from the lab XPS instrument. All of the data indicate that the near surface region of both the ammonium form and steamed Y zeolites is strongly enriched in aluminum. It is shown that when the inelastic mean free path of the photoelectrons is taken into account the laboratory XPS of aluminosilicates zeolites does not provide a true measurement of the surface stoichiometry, while variable kinetic energy XPS results in a more surface sensitive measurement. A comprehensive Si/Al concentration profile as a function of depth is developed by combining the data from the three surface characterization techniques. The LEIS spectroscopy reveals that the topmost atomic layer is further enriched in Al compared to subsequent layers.">Abstract</span>
| [[media:Bare-2016-Surface-analysis-of-zeolites-an-xps.pdf |Surface analysis of zeolites: An XPS, variable kinetic energy XPS, and low energy ion scattering study]]||Publication||SR Bare||[https://doi-org.proxy.findit.cvt.dk/10.1016/j.susc.2015.10.048 link]||X||||X||||||||Zeolites, Metal oxides||<span title="The surface Si/Al ratio in a series of zeolite Y samples has been obtained using laboratory XPS, synchrotron (variable kinetic energy) XPS, and low energy ion scattering (LEIS) spectroscopy. The non-destructive depth profile obtained using variable kinetic energy XPS is compared to that from the destructive argon ion bombardment depth profile from the lab XPS instrument. All of the data indicate that the near surface region of both the ammonium form and steamed Y zeolites is strongly enriched in aluminum. It is shown that when the inelastic mean free path of the photoelectrons is taken into account the laboratory XPS of aluminosilicates zeolites does not provide a true measurement of the surface stoichiometry, while variable kinetic energy XPS results in a more surface sensitive measurement. A comprehensive Si/Al concentration profile as a function of depth is developed by combining the data from the three surface characterization techniques. The LEIS spectroscopy reveals that the topmost atomic layer is further enriched in Al compared to subsequent layers.">Abstract</span>
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| [[media:Brongersma-2007-Surface-composition-analysis-by-low.pdf | Surface composition analysis by low-energy ion scattering]]||Publication, background||H H Brongersma||[http://apps.webofknowledge.com.proxy.findit.dtu.dk/CitedFullRecord.do?product=WOS&colName=WOS&SID=F6P8vdNQigRKywglhCq&search_mode=CitedFullRecord&isickref=WOS:000245323100001&cacheurlFromRightClick=no link]||||||X||||||||||<span title="Low-energy ion scattering (LEIS) is an analytical tool that provides information on the atomic composition of the outer surface, when noble gas ions are used as projectiles. In fact, quantitative composition analysis is currently done on a huge variety of materials, including catalysts and organic materials. The information on the surface composition is contained in the signal of backscattered ions (typically 1–3 keV He+, Ne+). In order to translate the LEIS signal to an elemental surface concentration all factors determining the LEIS signal must be known. These are in particular the scattering cross section and the ion fraction of the backscattered particles. The scattering cross section, which is due to the screened electrostatic potential between target atom and projectile, is well-known for the prevailing conditions of LEIS. It is an intriguing fact that, despite the large quantity of successful applications, the charge exchange processes in LEIS are not yet fully understood. It is e.g. not known why in LEIS for a given atomic species on the surface the signal usually does not depend on which other species are present (absence of matrix effects). Significant progress has recently been made in the understanding of the underlying charge exchange processes. Therefore, the aim of this review is twofold: on the one hand, to summarize the present understanding of the factors that determine the ion fraction of the scattered projectiles in LEIS, i.e. charge exchange processes. On the other hand, to summarize how quantitative surface composition analysis can be accomplished. In addition, we critically review publications that deal with surface composition analysis by LEIS, and analyze in which cases and by what means this was achieved and where and why it was successful or failed. After reading this review the reader will be able to deal with the pitfalls encountered in LEIS and to choose preferred experimental conditions for quantitative surface composition analysis.">Abstract</span>
| [[media:Brongersma-2007-Surface-composition-analysis-by-low.pdf | Surface composition analysis by low-energy ion scattering]]||Publication, background||H H Brongersma||[http://apps.webofknowledge.com.proxy.findit.dtu.dk/CitedFullRecord.do?product=WOS&colName=WOS&SID=F6P8vdNQigRKywglhCq&search_mode=CitedFullRecord&isickref=WOS:000245323100001&cacheurlFromRightClick=no link]||||||X||||||||||<span title="Low-energy ion scattering (LEIS) is an analytical tool that provides information on the atomic composition of the outer surface, when noble gas ions are used as projectiles. In fact, quantitative composition analysis is currently done on a huge variety of materials, including catalysts and organic materials. The information on the surface composition is contained in the signal of backscattered ions (typically 1–3 keV He+, Ne+). In order to translate the LEIS signal to an elemental surface concentration all factors determining the LEIS signal must be known. These are in particular the scattering cross section and the ion fraction of the backscattered particles. The scattering cross section, which is due to the screened electrostatic potential between target atom and projectile, is well-known for the prevailing conditions of LEIS. It is an intriguing fact that, despite the large quantity of successful applications, the charge exchange processes in LEIS are not yet fully understood. It is e.g. not known why in LEIS for a given atomic species on the surface the signal usually does not depend on which other species are present (absence of matrix effects). Significant progress has recently been made in the understanding of the underlying charge exchange processes. Therefore, the aim of this review is twofold: on the one hand, to summarize the present understanding of the factors that determine the ion fraction of the scattered projectiles in LEIS, i.e. charge exchange processes. On the other hand, to summarize how quantitative surface composition analysis can be accomplished. In addition, we critically review publications that deal with surface composition analysis by LEIS, and analyze in which cases and by what means this was achieved and where and why it was successful or failed. After reading this review the reader will be able to deal with the pitfalls encountered in LEIS and to choose preferred experimental conditions for quantitative surface composition analysis.">Abstract</span>

Revision as of 09:46, 31 January 2023

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Overview of the processing options on the XPS Nexsa

The acquisition of an instrument like the Nexsa has to be done through a EU tender process. As a somewhat unexpected result of this process, we were offered the Nexsa at a very favorable price. We were therefore able to squeeze all but one of the available options into the budget. That is, of course, very nice indeed, but it also means that we will have to investigate the applications of the various techniques as there is no applications waiting for a specific technique to become available.

We have therefore compiled the table below that contains articles and application notes in which several of the available techniques are used

The columns contain the following information (excluded are the columns where the content is evident):

  • Title: Click on the title to access a pdf version of the article/application note.
  • Web of Science: Click here to access the article in the Web of Science database (log on to WoS via DTU Inside in advance, click this link ). This will enable you to browse the cited references and citations of the article.
  • Abstract: Hover the mouse over the text to show the abstract of the article.

Template:author-jmli1

Publication Techniques and hardware applied Sample types/Materials Abstract: Hover cursor to show
Title Type Author Link XPS UPS ISS REELS Raman Additional options/hardware
Multitechnique Surface Characterization of Organic LED Material Application note P Mack X X X Organic LED's Abstract
Advantages of coincident XPS-Raman in the analysis of mineral oxides species Application note X X TiO2, CaCO3
Spectroscopic analysis of solid oxide fuel cell material with XPS Application note P Mack X
Rapid XPS image acquisition using SnapMap Application note R Simpson X SnapMap
Composition, coverage and band gap analysis of ALD-grown ultra thin films Application note P Mack X X X Band gap Gate dielectrics, HfO2, SiO2
Confirming the layer structure of an organic FET device Application note P Mack X MAGCIS Organic FET's,
Surface analysis of zeolites: An XPS, variable kinetic energy XPS, and low energy ion scattering study Publication SR Bare link X X Zeolites, Metal oxides Abstract
Surface composition analysis by low-energy ion scattering Publication, background H H Brongersma link X Abstract
Monitoring surface metal oxide catalytic active sites with Raman spectroscopy Publication, review I E Wachs link X Metal oxides Abstract
Diffusion of In0.53Ga0.47As elements through hafnium oxide during post deposition annealing Publication W Cabrera link X X TEM HfO2, InGaAs, ALD Abstract
Low energy ion scattering (LEIS). A practical introduction to its theory, instrumentation, and applications Publication, review C V Cushman link X Abstract
HfO2 on MoS2 by Atomic Layer Deposition: Adsorption Mechanisms and Thickness Scalability Publication S McDonnell link X X AFM, ALD HfO2, MoS2 Abstract
Highly Sensitive Detection of Surface and Intercalated Impurities in Graphene by LEIS Publication S Prusa link X graphene Abstract
Reflection electron energy loss spectroscopy for ultrathin gate oxide materials Publication H C Shin link X X Valence band HfZrO4, Abstract
Oxygen accumulation on metal surfaces investigated by XPS, AES and LEIS, an issue for sputter depth profiling under UHV conditions Publication R Steinberger link X X AES, ARXPS, sputter profiles Oxygen on metal surfaces Abstract
Electrochemical Characterization and Quantified Surface Termination Obtained by Low Energy Ion Scattering and X-ray Photoelectron Spectroscopy of Orthorhombic and Rhombohedral LaMnO3 Powders Publication E Symianakis link X X XRD Catalysts, LaMnO3 Abstract
The Thermal Oxidation of TiAlN High Power Pulsed Magnetron Sputtering Hard Coatings as Revealed by Combined Ion and Electron Spectroscopy Publication M Wiesing link X X X Ar sputtering TiAlN Abstract
Electronic structure and energy band gap of poly(9,9-dioctylfluorene) investigated by photoelectron spectroscopy Publication L S Liao link X X Polymer Abstract
Electronic and optical properties of hafnium indium zinc oxide thin film by XPS and REELS Publication Y R Denny link X X Abstract

Please don't hesitate to contact us if you find a relevant article to include in the table. Or if any of the articles listed is not suitable.