Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions

Revision as of 15:44, 30 January 2023 view source Indiogo (talk \| contribs) NLAB-Employees-701, NLAB-LabmanagerAllUsers 462 edits →Previous work on RTP Annealsys ← Older edit		Revision as of 15:46, 30 January 2023 view source Indiogo (talk \| contribs) NLAB-Employees-701, NLAB-LabmanagerAllUsers 462 edits →RTP Annealsys - Rapid Thermal Processor Newer edit →
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	[[media:Dissertation_ID_Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features.pdf\|Rapid Thermal Annealing and its Effects on Hig Aspect Ratio Silicon Features_MasterThesis_ID by Inês Diogo@DTU Nanolab]]		[[media:Dissertation_ID_Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features.pdf\|Rapid Thermal Annealing and its Effects on Hig Aspect Ratio Silicon Features_MasterThesis_ID by Inês Diogo@DTU Nanolab]]

	''Important remark: The RTO sequences developed during the previous experimental work on the RTP Annealsys are not available. More tests and further investigation is required.		'''''Important remark: The RTO sequences developed during the previous experimental work on the RTP Annealsys are not available. More tests and further investigation is required.'''''