Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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Moreover, during the E-step, the MFC (mass flow controller) presented a delay to read the pressure when compared with the power, creating unwanted bias. To fight it, the E-step was divided into E<sub>1</sub> and E<sub>2</sub>. The E<sub>1</sub> of only 2 s is enough to stabilize the pressure, and E<sub>2</sub> the profile is etch correctly, without the unwanted bias. | Moreover, during the E-step, the MFC (mass flow controller) presented a delay to read the pressure when compared with the power, creating unwanted bias. To fight it, the E-step was divided into E<sub>1</sub> and E<sub>2</sub>. The E<sub>1</sub> of only 2 s is enough to stabilize the pressure, and E<sub>2</sub> the profile is etch correctly, without the unwanted bias. | ||
[[File:graf bias & recipes.png|600px|center|thumb|'''''CORE process graphics and recipes: a) unwanted DC bias during the E-step; b) E-step separated into two steps, E<sub>1</sub> decreased the bias. March 2022''''']] | [[File:graf bias & recipes.png|600px|center|thumb|'''''CORE process graphics and recipes: a) unwanted DC bias during the E-step; b) E-step separated into two steps, E<sub>1</sub> decreased the bias. From @DTU internal, March 2022''''']] | ||
Going further, the process is set with 4 steps, Oxidize, Removal, E<sub>1</sub> and E<sub>2</sub> steps. In the E<sub>1</sub>, the pressure will rise, without power applied, so that for the E<sub>2</sub> the pressure is already rising and the power starts to be applied. | Going further, the process is set with 4 steps, Oxidize, Removal, E<sub>1</sub> and E<sub>2</sub> steps. In the E<sub>1</sub>, the pressure will rise, without power applied, so that for the E<sub>2</sub> the pressure is already rising and the power starts to be applied. | ||