Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions

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	''By Maria Farinha @~~nanolab~~, Jan 2023''		''By Maria Farinha @Nanolab Internal, Jan 2023''

	'''''Important!''''' The pressure settings used below '''''may no longer be permitted''''', always check with the Dry etch group.		'''''Important!''''' The pressure settings used below '''''may no longer be permitted''''', always check with the Dry etch group.