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Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions

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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,871 edits
Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,871 edits
Line 808: Line 808:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!rowspan="2"| AZ 5214E<br><span style="color:red">Old German version</span>
!rowspan="2"| AZ 5214E<br><span style="color:red">Old German version</span>
| 2020-10-01<br>jehem
| 2020-10-01
|rowspan="2"| 1.5 µm
|rowspan="2"| 1.5 µm
| 405 nm
| 405 nm
Line 819: Line 819:


|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
| 2021-03-23<br>jehem
| 2021-03-23
| 405 nm
| 405 nm
| Pneumatic
| Pneumatic
Line 832: Line 832:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
!rowspan="2"| AZ MiR 701<br><span style="color:red">Old PFOA containing version</span>
!rowspan="2"| AZ MiR 701<br><span style="color:red">Old PFOA containing version</span>
| 2020-02-01<br>jehem
| 2020-02-01
|rowspan="2"| 1.5 µm
|rowspan="2"| 1.5 µm
| 405 nm
| 405 nm
Line 843: Line 843:


|-style="background:silver; color:black"
|-style="background:silver; color:black"
| 2021-08-25<br>jehem
| 2021-08-25
| 405 nm
| 405 nm
| Pneumatic
| Pneumatic
Line 856: Line 856:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!rowspan="2"| AZ 5214E image reversal<br><span style="color:red">Old German version</span>
!rowspan="2"| AZ 5214E image reversal<br><span style="color:red">Old German version</span>
| 2020-10-01<br>jehem
| 2020-10-01
|rowspan="2"| 2.2 µm
|rowspan="2"| 2.2 µm
| 405 nm
| 405 nm
Line 867: Line 867:


|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
| 2021-08-25<br>jehem
| 2021-08-25
| 405 nm
| 405 nm
| Pneumatic
| Pneumatic
Line 880: Line 880:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
!AZ nLOF 2020
!AZ nLOF 2020
| 2023-01-13<br>jehem
| 2023-01-13
| 2.0 µm
| 2.0 µm
| 405
| 405
Line 894: Line 894:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!AZ 5214E<br><span style="color:green">New Japanese version</span>
!AZ 5214E<br><span style="color:green">New Japanese version</span>
| 2023-01-06<br>taran
| 2023-01-06
| 1.5 µm
| 1.5 µm
| 405
| 405
Line 908: Line 908:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
!AZ 5214E image reversal<br><span style="color:green">New Japanese version</span>
!AZ 5214E image reversal<br><span style="color:green">New Japanese version</span>
| 2023-01-06<br>taran
| 2023-01-06
| 2.2 µm
| 2.2 µm
| 405
| 405
Line 922: Line 922:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!AZ MiR 701<br><span style="color:green">New PFOA free version</span>
!AZ MiR 701<br><span style="color:green">New PFOA free version</span>
| 2021-08-25<br>jehem
| 2021-08-25
| 1.5 µm
| 1.5 µm
| 405
| 405
Line 936: Line 936:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
!AZ 4562<br><span style="color:green">New Japanese version</span>
!AZ 4562<br><span style="color:green">New Japanese version</span>
| 2021-12-08<br>jehem
| 2021-12-08
| 10 µm
| 10 µm
| 405
| 405
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