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Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions

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Indiogo (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Indiogo (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers
462 edits
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{| border="1" cellspacing="3" cellpadding="10"  align="left"
{| border="1" cellspacing="3" cellpadding="10"  align="left"
|-
|-
!width="25%" |Sample ID
!Sample ID
!width="25%" |Gas
!Gas
!width="25%" |Flow (SCCM)
!Flow (SCCM)
!width="25%" |Temperature (<sup>o</sup>C)
!Temperature (<sup>o</sup>C)
!width="25%" |Power (%)
!Power (%)
!width="25%" |Pressure (mbar)
!Pressure (mbar)
!width="25%" |Time (s)
!Time (s)
!width="25%" |HF dip
!HF dip
!width="25%" |Position
!Position
|-
|-
!RTA 1
!RTA 1
|Ar
|Ar||40||1328||80||12||180||No||Up
|40
|1328
|80
|12
|180
|No
|Up
|-
|-
!RTA 2
!RTA 2
Line 202: Line 195:
|-
|-
|}
|}
{| border="1" cellspacing="3" cellpadding="10"  align="left"
! Col1_head
! Col2_head
|-
|Col1_row1||Col2_row1
|-
|Col1_row2||Col2_row2
|-
|Col1_row3||Col2_row3
|-
|Col1_row4||Col2_row4
|-
|}
<br clear="all">


==== RTH ====
==== RTH ====
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