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Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions

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NLAB-Employees-701, NLAB-LabmanagerAllUsers
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{| border="1" style="text-align: center; width: 550px; height: 100px;"
{| border="1" style="text-align: center; width: 550px; height: 100px;"
|colspan="9" style="text-align: center;" style="background: #efefef;" | '''Details for each experiment'''
|-
|-
!width="25%" |Sample ID
!width="25%" |Sample ID
!width="15%" |Gas
!width="25%" |Gas
!width="15%" |Flow (SCCM)
!width="25%" |Flow (SCCM)
!width="15%" |Temperature (<sup>o</sup>C)
!width="25%" |Temperature (<sup>o</sup>C)
!width="15%" |Power (%)
!width="25%" |Power (%)
!width="15%" |Pressure (mbar)
!width="25%" |Pressure (mbar)
!width="15%" |Time (s)
!width="25%" |Time (s)
!width="15%" |HF dip
!width="25%" |HF dip
!width="15%" |Position
!width="25%" |Position
|-
|-
!RTA 1
!RTA 1
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