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Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions

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!width="15%" |Gas
!width="15%" |Gas
!width="15%" |Flow (SCCM)
!width="15%" |Flow (SCCM)
!width="15%" |Temperature (C)
!width="15%" |Temperature (<sup>o</sup>C)
!width="15%" |Power (%)
!width="15%" |Power (%)
!width="15%" |Pressure (mbar)
!width="15%" |Pressure (mbar)