Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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!width="15%" |Gas | !width="15%" |Gas | ||
!width="15%" |Flow (SCCM) | !width="15%" |Flow (SCCM) | ||
!width="15%" |Temperature (C) | !width="15%" |Temperature (<sup>o</sup>C) | ||
!width="15%" |Power (%) | !width="15%" |Power (%) | ||
!width="15%" |Pressure (mbar) | !width="15%" |Pressure (mbar) | ||