Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
Tag: Manual revert |
|||
| Line 98: | Line 98: | ||
==== Argon RTA ==== | ==== Argon RTA ==== | ||
Rapid thermal annealing sequences were developed and studied using only argon (Ar). Some experiments were repeated in an attempt to establish a reproducibility study. Type I samples were used and processed on top of silicon carrier wafers, with no bonding required. The details for each experiment are presented in the following table. | Rapid thermal annealing sequences were developed and studied using only argon (Ar). Some experiments were repeated in an attempt to establish a reproducibility study. Type I samples were used and processed on top of silicon carrier wafers, with no bonding required. The details for each experiment are presented in the following table. | ||
{| border="1" style="text-align: center; width: 550px; height: 100px;" | |||
|colspan="6" style="text-align: center;" style="background: #efefef;" | '''Wafers available in the cleanroom''' | |||
|- | |||
!scope="row" width="15%"| | |||
!width="15%" |Size | |||
!width="15%" |Type | |||
!width="15%" |Thickness | |||
!width="15%" |Resistivity | |||
|- | |||
!SSP (single side polished) | |||
|2" | |||
|P | |||
|500 µm | |||
|1-20 Ωcm | |||
|- | |||
!SSP (single side polished) | |||
|4" | |||
|N or P | |||
|525 µm | |||
|1-20 Ωcm | |||
|- | |||
!SSP (single side polished) | |||
|6" | |||
|N | |||
|625 µm | |||
|10-20 Ωcm | |||
|- | |||
!SSP (single side polished) | |||
|8" | |||
|N | |||
|725 µm | |||
|1-10 Ωcm | |||
|- | |||
!DSP (double side polished) | |||
|4" | |||
|N or P | |||
|350 µm | |||
|1-20 Ωcm | |||
|- | |||
!DSP (double side polished) | |||
|4" | |||
|N | |||
|500 µm | |||
|1-20 Ωcm | |||
|- | |||
!DSP (double side polished) | |||
|6" | |||
|N | |||
|500 µm | |||
|1-20 Ωcm | |||
|- | |||
!Fused silica wafers | |||
|4" | |||
| | |||
|500 µm or 1 mm | |||
| | |||
|- | |||
!Boron glass wafers | |||
|4" | |||
| | |||
|500 µm | |||
| | |||
|- | |||
!pre-processed<sup>{{fn|1}}</sup> | |||
|4" and 6" | |||
| | |||
| | |||
| | |||
|- | |||
|} | |||
==== RTH ==== | ==== RTH ==== | ||