Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
| Line 95: | Line 95: | ||
===Processes in detail=== | ===Processes in detail=== | ||
==== Argon RTA ==== | ==== Argon RTA ==== | ||
Rapid thermal annealing sequences were developed and studied using only argon (Ar). Some experiments were repeated in an attempt to establish a reproducibility study. Type I samples were used and processed on top of silicon carrier wafers, with no bonding required. The details for each experiment are presented in the following table. | |||
==== RTH ==== | ==== RTH ==== | ||
==== Hydrogen/Argon RTA ==== | ==== Hydrogen/Argon RTA ==== | ||