Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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==Previous work on RTP Annealsys== | ==Previous work on RTP Annealsys== | ||
==Experiments Overview== | ===Experiments Overview=== | ||
Considering the available process gases, various types of RTP were studied, such as rapid thermal annealing (RTA), hydrogenation (RTH), oxidation (RTO), vacuum (RTV) and Black Si smoothing (Clean BSi). In addition, it was developed a sequence for tool calibration. | Considering the available process gases, various types of RTP were studied, such as rapid thermal annealing (RTA), hydrogenation (RTH), oxidation (RTO), vacuum (RTV) and Black Si smoothing (Clean BSi). In addition, it was developed a sequence for tool calibration. | ||
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