Specific Process Knowledge/Etch/Overview of chemicals: Difference between revisions
| Line 102: | Line 102: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Chrome etch 18 | !style="background:silver; color:black;" align="left"|Chrome etch 18 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0hHR0pMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 109: | Line 108: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L | !style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE5FSkVMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 108-10-1] | ||
108-10-1 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 116: | Line 114: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid | !style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkdNR0tITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|Aicello | !style="background:LightGrey; color:black;"|Aicello | ||
| Line 123: | Line 120: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Ethanol | !style="background:silver; color:black;" align="left"|Ethanol | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUpFRklGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 64-17-5] | ||
64-17-5 | |||
!style="background:LightGrey; color:black;"|99,9%-100% | !style="background:LightGrey; color:black;"|99,9%-100% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 130: | Line 126: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE) | !style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUdJSUpNS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|12,5% | !style="background:LightGrey; color:black;"|12,5% | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 137: | Line 132: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent) | !style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUZKS01LSlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|12,5% | !style="background:LightGrey; color:black;"|12,5% | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 144: | Line 138: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hexamethyldisilasan | !style="background:silver; color:black;" align="left"|Hexamethyldisilasan | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhER0VFRkxJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. 999-97-3] | ||
999-97-3 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 151: | Line 144: | ||
|- | |- | ||
!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF) | !style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkpITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
|style="background:LightGrey; color:black"|1% | |style="background:LightGrey; color:black"|1% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
|style="background:WhiteSmoke; color:black"|Comment | |style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkhLTlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.] | ||
|style="background:LightGrey; color:black"|10% | |style="background:LightGrey; color:black"|10% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"|Will be removed ones we no longer have any in storigs | ||
|- | |- | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSktOTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
|style="background:LightGrey; color:black"|40% | |style="background:LightGrey; color:black"|40% | ||
!style="background:LightGrey; color:black;"|EMSURE® ISO for analysis | !style="background:LightGrey; color:black;"|EMSURE® ISO for analysis | ||
|style="background:WhiteSmoke; color:black"|Comment | |style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0pJTEtJR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
|style="background:LightGrey; color:black"|50% | |style="background:LightGrey; color:black"|50% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 176: | Line 165: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hydrochloric acid | !style="background:silver; color:black;" align="left"|Hydrochloric acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. 7647-01-0 | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElITUpITlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7647-01-0] | ||
!style="background:LightGrey; color:black;"|37% | !style="background:LightGrey; color:black;"|37% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 182: | Line 171: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hydrogenperoxid | !style="background:silver; color:black;" align="left"|Hydrogenperoxid | ||
!style="background:LightGrey; color:black;"|Cas Nr. 7722-84-1 | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESUlKRUVISVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7722-84-1] | ||
!style="background:LightGrey; color:black;"|31% | !style="background:LightGrey; color:black;"|31% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 188: | Line 177: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal | !style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSk1GSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 195: | Line 183: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal | !style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSklKRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 202: | Line 189: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Microposit Remover 1165 | !style="background:silver; color:black;" align="left"|Microposit Remover 1165 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0VOSUpFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|Grade | !style="background:LightGrey; color:black;"|Grade | ||
| Line 209: | Line 195: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Nitric acid | !style="background:silver; color:black;" align="left"|Nitric acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEpITkVGTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 231-714-2] | ||
231-714-2 | |||
!style="background:LightGrey; color:black;"|69% | !style="background:LightGrey; color:black;"|69% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 216: | Line 201: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid | !style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTEdOS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-38-2] | ||
7664-38-2 | |||
!style="background:LightGrey; color:black;"|85% | !style="background:LightGrey; color:black;"|85% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 223: | Line 207: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Potassium hydroxide solution | !style="background:silver; color:black;" align="left"|Potassium hydroxide solution | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE1IS0xIRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 1310-58-3] | ||
1310-58-3 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|Selectipur | !style="background:LightGrey; color:black;"|Selectipur | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"| | !style="background:silver; color:black;" align="left"|Isoropanol | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEhITUlHRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 67-63-0] | ||
67-63-0 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|VLSi | !style="background:LightGrey; color:black;"|VLSi | ||
| Line 237: | Line 219: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 2005 | !style="background:silver; color:black;" align="left"|SU-8 2005 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr] | ||
no .nr | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 244: | Line 225: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 2035 | !style="background:silver; color:black;" align="left"|SU-8 2035 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr] | ||
no nr | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 251: | Line 231: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 2075 | !style="background:silver; color:black;" align="left"|SU-8 2075 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr] | ||
no nr | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 258: | Line 237: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600) | !style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkdITklFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 265: | Line 243: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 Thinner | !style="background:silver; color:black;" align="left"|SU-8 Thinner | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0dLRktGVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 272: | Line 249: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Sulfamic acid | !style="background:silver; color:black;" align="left"|Sulfamic acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESklISUVLS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 5329-14-6] | ||
5329-14-6 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|Alkamlimetry | !style="background:LightGrey; color:black;"|Alkamlimetry | ||
| Line 279: | Line 255: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Sulfuric acid | !style="background:silver; color:black;" align="left"|Sulfuric acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTk1GTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-93-9] | ||
7664-93-9 | |||
!style="background:LightGrey; color:black;"|95%-97% | !style="background:LightGrey; color:black;"|95%-97% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 286: | Line 261: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|TI spray | !style="background:silver; color:black;" align="left"|TI spray | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUlHSE1NTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 293: | Line 267: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|ZED N50 | !style="background:silver; color:black;" align="left"|ZED N50 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpOTUlMVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 300: | Line 273: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Triton x-100 | !style="background:silver; color:black;" align="left"|Triton x-100 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEdORUlJRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 9002-93-1] | ||
9002-93-1 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
Revision as of 08:54, 30 January 2023
Feedback to this page: click here
THIS PAGE IS UNDER CONSTRUCTION
| Chemical | Cas Nr. | Concentration | Grade | Comment |
|---|---|---|---|---|
| Acetone | Cas Nr. 67-64-1 | 99,8%-100% | VLSi | |
| Ammoniumhydroxyd | Cas Nr. 1336-21-6 | 28% | VLSI | Comment |
| Ammoniumperoxodisulfat | Cas Nr. 7727-54-0 | 98%-99,1% | Analyse | Comment |
| Anisole Anhydrous | Cas Nr. 100-66-3 | 99,7% | GPR | Comment |
| AR-600-546 Developer | Cas Nr. no nr. | not specific | not specific | Comment |
| AR-600-71 Remover | Cas Nr. no nr. | not specific | not specific | Comment |
| AR-6200.09 E-beam resist | Cas Nr. no nr. | not specific | not specific | Comment |
| AZ 351B Developer | Cas Nr. no nr. | not specific | not specific | Comment |
| AZ 4562 Photoresist | Cas Nr. no nr. | not specific | not specific | Comment |
| AZ 5214E Photoresist | Cas Nr. no nr. | not specific | not specific | Comment |
| AZ 726MIF developer | Cas Nr. no nr. | not specific | not specific | Comment |
| AZ 726MIF developer (Tromle) | Cas Nr. no nr. | not specific | not specific | Comment |
| AZ MiR 701 (29CPS) Photoresist | Cas Nr. No nr. | not specific | not specific | Comment |
| AZ nLOF 2020 Photoresist | Cas Nr. no nr. | not specific | not specific | Comment |
| Boric Acid powder | Cas Nr. 10043-35-3 | not specific | Analytic | Comment |
| Chrome etch 18 | Cas Nr. no nr. | not specific | not specific | Comment |
| Developer MIBK Methylisobutylketon 4L | Cas Nr. 108-10-1 | not specific | VLSI | Comment |
| DUV42S-6,4 L ultra nowpak W/Closure lid | Cas Nr. no nr. | not specific | Aicello | Comment |
| Ethanol | Cas Nr. 64-17-5 | 99,9%-100% | VLSI | Comment |
| Hydrofluoric acid buffer (BHF/BOE) | Cas Nr. no nr. | 12,5% | not specific | Comment |
| Hydrofluoric acid buffer (BHF/BOE W/wetting agent) | Cas Nr. no nr. | 12,5% | not specific | Comment |
| Hexamethyldisilasan | Cas Nr. 999-97-3 | not specific | not specific | Comment |
| HYDROFLUORIC ACID (HF) | Cas Nr. no nr. | 1% | VLSI | Comment |
| Cas Nr. No nr. | 10% | VLSI | Will be removed ones we no longer have any in storigs | |
| Cas Nr. no nr. | 40% | EMSURE® ISO for analysis | Comment | |
| Cas Nr. no nr. | 50% | VLSI | Comment | |
| Hydrochloric acid | Cas Nr. 7647-01-0 | 37% | VLSI | Comment |
| Hydrogenperoxid | Cas Nr. 7722-84-1 | 31% | VLSI | Comment |
| KRF m230Y 6cP Gal | Cas Nr. no nr. | not specific | not specific | Comment |
| KRF M35G 27cP Gal | Cas Nr. no nr. | not specific | not specific | Comment |
| Microposit Remover 1165 | Cas Nr. no nr. | not specific | Grade | Comment |
| Nitric acid | Cas Nr. 231-714-2 | 69% | VLSI | Comment |
| Ortho-Phosphoric acid | Cas Nr. 7664-38-2 | 85% | VLSI | Comment |
| Potassium hydroxide solution | Cas Nr. 1310-58-3 | not specific | Selectipur | Comment |
| Isoropanol | Cas Nr. 67-63-0 | not specific | VLSi | Comment |
| SU-8 2005 | Cas Nr. no .nr | not specific | not specific | Comment |
| SU-8 2035 | Cas Nr. no .nr | not specific | not specific | Comment |
| SU-8 2075 | Cas Nr. no .nr | not specific | not specific | Comment |
| SU-8 Developer (Mr-dev 600) | Cas Nr. no nr. | not specific | not specific | Comment |
| SU-8 Thinner | Cas Nr. no nr. | not specific | not specific | Comment |
| Sulfamic acid | Cas Nr. 5329-14-6 | not specific | Alkamlimetry | Comment |
| Sulfuric acid | Cas Nr. 7664-93-9 | 95%-97% | VLSI | Comment |
| TI spray | Cas Nr. no nr. | not specific | not specific | Comment |
| ZED N50 | Cas Nr. no nr. | not specific | not specific | Comment |
| Triton x-100 | Cas Nr. 9002-93-1 | not specific | not specific | Comment |