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Created page with "== Manual Spin Coaters == {| cellpadding="2" style="border: 2px solid darkgray;" align="right" ! width="350" | ! width="350" | ! width="350" | |- border="0" align="center" |300px |300px |300px |- align="center" | '''Spin Coater: Labspin 02''' || '''Spin Coater: Labspin 03 + fumehood 11''' || '''Spin Coater: Manual All Purpose (Decommissioned)''' |- align="center" | Loacted in w..."
 
Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,915 edits
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== Manual Spin Coaters ==
==Spin coater: Labspin==


{| cellpadding="2" style="border: 2px solid darkgray;" align="right"
{| cellpadding="2" style="border: 0px solid darkgray;" align="right"
! width="350" |
! width="350" |
! width="350" |  
! width="350" |  
! width="350" | 


|- border="0" align="center"
|- border="0" align="center"
|[[Image:Labspin_2.JPG|300px]]
|[[Image:Labspin_2.JPG|300px]]
|[[Image:Labspin_3_+_fumehood_11.JPG|300px]]
|[[Image:Labspin_3_+_fumehood_11.JPG|300px]]
|[[Image:IMG 1175.JPG|300px]]


|- align="center"
|- align="center"
| '''Spin Coater: Labspin 02''' ||  '''Spin Coater: Labspin 03 + fumehood 11''' || '''Spin Coater: Manual All Purpose (Decommissioned)'''
|'''Spin Coater: Labspin 02'''
|'''Spin Coater: Labspin 03 + fumehood 11'''


|- align="center"
|- align="center"
| Loacted in wetbench 08 in E-5 ||  Located in wetbench 09 in E-5|| Located in fumehood in C-1
|Loacted in wetbench 08 in E-5
|Located in wetbench 09 in E-5


|- align="center"
|- align="center"
| LabSpin 6, Süss MicroTec || LabSpin 6, Süss MicroTec || WS-650, Laurell
|LabSpin 6, Süss MicroTec
|LabSpin 6, Süss MicroTec


|- align="center"
|- align="center"
| '''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=362 LabManager]''' || '''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=387 LabManager]''' || '''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=315 LabManager]'''
|'''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=362 LabManager]'''|
|'''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=387 LabManager]'''|


|}
|}
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===Process information===
===Process information===


Spin curves (LabSpin 6): [[media:AZ5214E_spin_curve.pdf‎|AZ 5214E‎]], [[media:Spin_curve_nLoF2020.pdf‎|AZ nLOF 2020]], [[media:Spin_curve_ZEP520A.pdf‎|ZEP 520A‎]], [[media:Spin_curve_Fox-15.pdf|FOX-15]], [[media:AZ_4562_spin_curve.pdf|AZ 4562‎]], [[Specific_Process_Knowledge/Lithography/CSAR#Spin_Curves|CSAR 6200]], [[media:AZ MiR 701 spin curve.pdf|AZ MiR 701]].  
Spin curves (LabSpin 6):
 
*[[media:AZ5214E_spin_curve.pdf‎|AZ 5214E‎]]
More information on resists (incl. spin curves) is available in the [[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|Resist Overview]].
*[[media:Spin_curve_nLoF2020.pdf‎|AZ nLOF 2020]]
 
*[[media:Spin_curve_ZEP520A.pdf‎|ZEP 520A‎]]
*[[media:Spin_curve_Fox-15.pdf|FOX-15]]
*[[media:AZ_4562_spin_curve.pdf|AZ 4562‎]]
*[[Specific_Process_Knowledge/Lithography/CSAR#Spin_Curves|CSAR 6200]]
*[[media:AZ MiR 701 spin curve.pdf|AZ MiR 701]].  


'''This table is under construction''' [[Image:section under construction.jpg|70px]]
More information on resists (incl. spin curves) is available in the [[Specific_Process_Knowledge/Lithography/Resist]].


'''Available bowlsets:'''
'''Available bowlsets:'''
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/Coaters/labspin"