Specific Process Knowledge/Lithography/Coaters/GammaUV: Difference between revisions
Appearance
| Line 91: | Line 91: | ||
Silicon and glass | Silicon and glass | ||
Resist and crystalbond is not allowed in the HMDS module | |||
|- | |- | ||
|style="background:LightGrey; color:black"|Batch | |style="background:LightGrey; color:black"|Batch | ||