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| =Standard Processes= | | =Standard Processes= |
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| ==Quality Control (QC)==
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| '''THIS SECTION IS UNDER CONSTRUCTION''' [[Image:section under construction.jpg|70px]]
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| {| border="1" cellspacing="2" cellpadding="2" colspan="3"
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| |bgcolor="#98FB98" |'''Quality Control (QC) for Spin Coater: Gamma UV - AZ nLOF 2020'''
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| |-
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| *[http://labmanager.dtu.dk/d4Show.php?id=5123&mach=359 The QC procedure for Spin Coater: Gamma UV]<br>
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| *[http://labmanager.dtu.dk/view_binary.php?fileId=4211 The newest QC data for Spin Coater: Gamma UV]
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| {| {{table}}
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| | align="center" |
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| {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:400px"
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| ! QC Recipe:
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| ! (2421) DCH 100mm nLOF 2020 2um HMDS
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| |-
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| |Substrate size
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| |4"
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| |-
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| | Resist volume
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| |3 ml
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| |-
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| |Spin-off speed
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| |3300 rpm
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| |-
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| |Spin-off time
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| |30 s
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| |-
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| |Soft bake temperature
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| |110°C, contact
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| |-
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| |Soft bake time
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| |60 s
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| |-
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| |}
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| | align="center" valign="top"|
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| {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:400px"
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| !QC limits
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| !Spin Coater: Gamma UV - AZ nLOF 2020
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| |-
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| |Nominal film thickness
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| |2.0 µm
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| |-
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| |Film thickness deviation from nominal
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| |<5%
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| |-
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| |Film thickness non-uniformity
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| |<5%
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| |-
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| |}
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| |-
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| |}
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| Spin-off speed will be adjusted if film thickness is outside the limit.
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| |}
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| {| border="1" cellspacing="2" cellpadding="2" colspan="3"
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| |bgcolor="#98FB98" |'''Quality Control (QC) for Spin Coater: Gamma UV - AZ 5214E'''
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| |-
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| *[http://labmanager.dtu.dk/d4Show.php?id=5123&mach=359 The QC procedure for Spin Coater: Gamma UV]<br>
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| *[http://labmanager.dtu.dk/view_binary.php?fileId=4211 The newest QC data for Spin Coater: Gamma UV]
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| {| {{table}}
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| | align="center" |
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| {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:400px"
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| ! QC Recipe:
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| ! (3411) DCH 100mm 5214E 1.5um HMDS
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| |-
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| |Substrate size
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| |4"
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| |-
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| | Resist volume
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| |3 ml
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| |-
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| |Spin-off speed
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| |4500 rpm
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| |-
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| |Spin-off time
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| |30 s
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| |-
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| |Soft bake temperature
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| |90°C, contact
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| |-
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| |Soft bake time
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| |60 s
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| |-
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| |}
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| | align="center" valign="top"|
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| {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:400px"
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| !QC limits
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| !Spin Coater: Gamma UV - AZ 5214E
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| |-
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| |Nominal film thickness
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| |1.5 µm
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| |-
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| |Film thickness deviation from nominal
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| |<5%
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| |-
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| |Film thickness non-uniformity
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| |<5%
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| |-
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| |}
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| |-
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| |}
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| Spin-off speed will be adjusted if film thickness is outside the limit.
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| |}
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| ==HMDS priming== | | ==HMDS priming== |
