Specific Process Knowledge/Pattern Design: Difference between revisions
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Our standard mask supplier is [http://Compugraphics.com/ Compugraphics]. They can provide 5" and 7" masks on soda lime glass or quartz. Minimum feature size can be 0.8µm, 1µm or 1.5µm which is reflected in the price. Read a short guide on[[Media: | Our standard mask supplier is [http://Compugraphics.com/ Compugraphics]. They can provide 5" and 7" masks on soda lime glass or quartz. Minimum feature size can be 0.8µm, 1µm or 1.5µm which is reflected in the price. Read a short guide on[[Media:Mask_Ordering_Guide.pdf| how to order photomasks from Compugraphics]] here. Templates for the mask specifications for 5" and 7" masks respectively can be seen [[mask_spec| here.]] | ||
The masks have to be ordered in Procure. Nanolab cannot order the mask for you but we do offer a final check of the design and mask specifications before you place the order. You can find a guide on [[Media: | The masks have to be ordered in Procure. Nanolab cannot order the mask for you but we do offer a final check of the design and mask specifications before you place the order. You can find a guide on [[Media:Maskordering_in_Fusion.pdf| how to order and attach design files in procure]] here. | ||
If you are using L-edit to design your mask you should remember to mark the top cell as the fabrication cell; a small pink <b style="color:magenta">''f''</b> should show to the left of the cell name in the Design Navigator. | If you are using L-edit to design your mask you should remember to mark the top cell as the fabrication cell; a small pink <b style="color:magenta">''f''</b> should show to the left of the cell name in the Design Navigator. | ||
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We can also provide guidance regarding the mask design phase. Please contact the mask team for help and review, E-mail address can be found in [[Danchip_contact_information|Nanolab contact information]]. | We can also provide guidance regarding the mask design phase. Please contact the mask team for help and review, E-mail address can be found in [[Danchip_contact_information|Nanolab contact information]]. | ||
*[[Media: | *[[Media:Maskordering_in_Fusion.pdf| How to order and attach design files in procure]] | ||
*[[mask_spec| Templates for 5" and 7" mask specifications]] | *[[mask_spec| Templates for 5" and 7" mask specifications]] | ||