Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow etch: Difference between revisions
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File:contour plot for etchrate of slow etch in SiO2.JPG| Etch rate map of SiO2 etch on 6" wafer | File:contour plot for etchrate of slow etch in SiO2.JPG| Etch rate map of SiO2 etch on 6" wafer | ||
File:contour plot for etchrate of slow etch in SRN.JPG| Etch rate map of SRN etch on 6" wafer | File:contour plot for etchrate of slow etch in SRN.JPG| Etch rate map of SRN etch on 6" wafer | ||
</gallery> | |||
<gallery caption="Map of etch rate measurements for 'Slow Etch2'" widths="300px" heights="300px" perrow="2"> | |||
File:Contour Plot etch rates Si3N4.jpg| Etch rate map of Si3N4 etch on 4" wafer (on 6" carrier) | |||
File:Contour Plot etch rates SRN.jpg| Etch rate map of SRN etch on 4" wafer (on 6" carrier) | |||
File:Contour Plot etch rates SiO2.jpg|Etch rate map of SiO2 etch on 4" wafer (on 6" carrier) | |||
File:Contour Plot etch rates Si.jpg|Etch rate map of Si etch on 4" wafer (on 6" carrier) | |||
</gallery> | </gallery> | ||