Specific Process Knowledge/Lithography/EBeamLithography/EBLLandingpage: Difference between revisions

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	Contrary to most UV resist it is in general not advisable to use HMDS priming when coating with EBL resists. There can of course be exceptions to this but we do not recommend HMDS priming when using the DTU Nanolab supplied EBL resists.		Contrary to most UV resist it is in general not advisable to use HMDS priming when coating with EBL resists. There can of course be exceptions to this but we do not recommend HMDS priming when using the DTU Nanolab supplied EBL resists.


	{\|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" width="95%"		{\|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" width="95%"