Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
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!Process flow examples | !Process flow examples | ||
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[[media:Process_Flow_AZ5214E_pos_vers2.docx |Process_Flow_AZ5214_pos.docx]] | |||
[[media:Process_Flow_AZ5214E_rev_vers2.docx |Process_Flow_AZ5214_rev.docx]] | |||
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[[media:Process_Flow_AZ5214E_MLA_pos.docx |Process_Flow_AZ5214_MLA_pos.docx]] | |||
[[media:Process_Flow_AZ5214E_MLA_rev.docx |Process_Flow_AZ5214_MLA_rev.docx]] | |||
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[[media:Process_Flow_AZ_MiR701.docx|Process_Flow_AZ_MiR701.docx]] | |||
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[[media:Process_Flow_AZ_MiR701_MLA.docx|Process_Flow_AZ_MiR701_MLA.docx]] | |||
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[[media:Process_Flow_AZ_nLOF_2020.docx|Process_Flow_AZ_nLOF_2020.docx]] | |||
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[[media:Process_Flow_AZ_nLOF_2020_MLA.docx|Process_Flow_AZ_nLOF_2020_MLA.docx]] | |||
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[[media:Process_Flow_thick_AZ4562_vers2.docx|Process_Flow_thick_AZ4562.docx]] | |||
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[[media:Process_Flow_thick_AZ4562_MLA.docx|Process_Flow_thick_AZ4562_MLA.docx]] | |||
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[[media:Process_Flow_SU8_70um.docx|Process_Flow_SU8_70um.docx]] | |||
Most of the process knowledge on SU-8 is based in research groups | |||
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