Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
Appearance
| Line 330: | Line 330: | ||
==Aligner: Maskless 01== | ==Aligner: Maskless 01== | ||
The Aligner: Maskless 01 has a 365 nm LED light source. | |||
{|border="1" cellspacing="1" cellpadding="7" style="text-align:left;" | {|border="1" cellspacing="1" cellpadding="7" style="text-align:left;" | ||
|- | |- | ||