Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
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= UV resist comparison table = | = UV resist comparison table = | ||
Comparison of specifications and feature space of UV photoresists. | Comparison of specifications and feature space of UV photoresists. | ||
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!Thickness range | |||
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!Coating tool | |||
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= Exposure dose = | = Exposure dose = | ||