Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions

@@ Line 33: / Line 33: @@
 |style="background:LightGrey; color:black"|
 |style="background:WhiteSmoke; color:black"|
-* up to 1250 C
+* up to 1250 <sup>o</sup>C
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process gas
@@ Line 55: / Line 55: @@
 |style="background:LightGrey; color:black"|Valve (APC)
 |style="background:WhiteSmoke; color:black"|
-*0 - 100
+*0<sup>o</sup> - 100<sup>o</sup>
 |-
 |style="background:LightGrey; color:black"|Controller