Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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The RTP Annealsys, with a base pressure of 10<sup>-6</sup> mbar, is a research tool. As such, there are some parameters and details to consider. | The RTP Annealsys, with a base pressure of 10<sup>-6</sup> mbar, is a research tool. As such, there are some parameters and details to consider. | ||
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Specifics | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Specifics | ||