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Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions

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* up to 1250 C
* up to 1250 C
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!style="background:silver; color:black;" align="center" width="60"|Performance
|style="background:LightGrey; color:black"|Resolution
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*1-2 nm (limited by vibrations)
The resolution is strongly dependent on the type of sample and the skills of the operator.
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!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Instrument specifics
!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Instrument specifics