Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions

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 !style="background:silver; color:black" align="center" valign="center" rowspan="1"|Temperature
-|style="background:LightGrey; color:black"|Imaging and measurement of
+|style="background:LightGrey; color:black"|
 |style="background:WhiteSmoke; color:black"|
-* Conducting samples
+* up to 1250 C
-* Semi-conducting samples
-* Thin (~ 5 µm <) layers of non-conducting materials such as polymers
-* Thick polymers, glass or quartz samples
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="1"|Process gas