Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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| '''E<sub>2</sub>-step''' || * || 220 mTorr || 0 || 350 || 300 | | '''E<sub>2</sub>-step''' || * || 220 mTorr || 0 || 350 || 300 | ||
|} ''*The E<sub>2</sub>-time value was changed and observed.'' | |} ''*The E<sub>2</sub>-time value was changed and observed.'' | ||
Regarding the measurements of the profiles, in a) the depth reached 3.17 µm with 0-15s of ramping, b) reached 3.21 µm with 1-15s of ramping, c) reached 2.87 µm whit 5-15s of ramping and d) reached 3.63 µm with 15 s without ramping. | |||
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