Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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''January 2023: The RTP Annealsys is being tested, but it is not released for general use yet. Please contact thinfilm@nanolab.dtu.dk for more information.'' | |||
'''RTP Annealsys (RTP AS-Premium, serial number AS0415C4 - 7484, from ANNEALSYS)''' is a research tool available at DTU Nanolab, able to perform several types of rapid thermal processing. Currently, it is being used for '''rapid thermal annealing and smoothing''' of silicon substrates. | |||
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process/RTP_Annealsys click here]''' | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process/RTP_Annealsys click here]''' | ||
Revision as of 15:15, 24 January 2023
THIS PAGE IS UNDER CONSTRUCTION
RTP Annealsys - Rapid Thermal Processor
January 2023: The RTP Annealsys is being tested, but it is not released for general use yet. Please contact thinfilm@nanolab.dtu.dk for more information.
RTP Annealsys (RTP AS-Premium, serial number AS0415C4 - 7484, from ANNEALSYS) is a research tool available at DTU Nanolab, able to perform several types of rapid thermal processing. Currently, it is being used for rapid thermal annealing and smoothing of silicon substrates.
Feedback to this page: click here