Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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[[File:nH R-power.png|500px|left|thumb|'''''Nanoholes profile when varying the removal power.''''']] | [[File:nH R-power.png|500px|left|thumb|'''''Nanoholes profile when varying the removal power.''''']] | ||
{| border="1" style="text-align: center; width: 650px; height: 200px" | {| border="1" style="text-align: center; width: 650px; height: 200px" | ||
|+ 200nm nanoholes recipe from | |+ 200nm nanoholes recipe from April 2022 | ||
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|-style="background:LightGray; color:Black" | |-style="background:LightGray; color:Black" | ||