Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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|} ''*The R-power value was changed and observed.'' | |} ''*The R-power value was changed and observed.'' | ||
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The most suitable removal power was 40 W, removing the bottom of the profile correctly without damaging the top part of the profile. | |||
[[File:nH E-time.png|400px|left|thumb|'''''Nanoholes profile when varying the ramping E-time .''''']] | [[File:nH E-time.png|400px|left|thumb|'''''Nanoholes profile when varying the ramping E-time .''''']] | ||