Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
| Line 74: | Line 74: | ||
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| '''E<sub>2</sub>-step''' || 0-15 || 220 mTorr || 0 || 350 || 100-300 | | '''E<sub>2</sub>-step''' || 0-15 || 220 mTorr || 0 || 350 || 100-300 | ||
|} *The R-power value was changed and observed. | |} ''*The R-power value was changed and observed.'' | ||