Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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[[File:nH R-power.png|400px]] | [[File:nH R-power.png|400px|left|thumb|'''''Nanoholes profile when varying the removal power.''''']] | ||
[[File:nH E-time.png|400px]] | [[File:nH E-time.png|400px|left|thumb|'''''Nanoholes profile when varying the ramping E-time .''''']] | ||
=== Isotropic etch === | === Isotropic etch === | ||