Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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| '''E<sub>2</sub>-step''' || || || || || | | '''E<sub>2</sub>-step''' || || || || || | ||
|} | |} | ||
[[File:nH R-power.png|400px]] | |||
[[File:nH E-time.png|400px]] | |||
=== Isotropic etch === | === Isotropic etch === | ||