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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions

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NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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Mfarin (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
781 edits
Line 126: Line 126:
! rowspan="3" align="center"| Isotropic etch
! rowspan="3" align="center"| Isotropic etch
| O-step
| O-step
| 300
| 30
| 200 mTorr
| 200 mTorr
| 200
| 200
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