Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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Using patterned samples of 1 μm pillars with 50 nm of Al<sub>2</sub>O<sub>3</sub>. After the tests, approximately 32nm of Al<sub>2</sub>O<sub>3</sub> were still intact. | Using patterned samples of 1 μm pillars with 50 nm of Al<sub>2</sub>O<sub>3</sub>. After the tests, approximately 32nm of Al<sub>2</sub>O<sub>3</sub> were still intact. | ||
<br clear="all" /> | <br clear="all" /> | ||
[[File:compare pillars.png|200px|left|thumb|'''''Pillars with different etching times.''''']] | |||
{| border="1" style="text-align: center; width: 650px; height: 200px" | {| border="1" style="text-align: center; width: 650px; height: 200px" | ||
|+ 1μm Pillar recipe from March 2022 - #244 = 122 min | |+ 1μm Pillar recipe from March 2022 - #244 = 122 min | ||
|-style="background:LightGray; color:Black" | |-style="background:LightGray; color:Black" | ||
! | ! !! Time (s) !! Pressure (valve control) !! O<sub>2</sub> flow (SCCM) !! SF<sub>6</sub> flow (SCCM) !! Platen power (W) | ||
|- | |- | ||
| '''O-step''' || 10 || 3% || 200 || 0 || 40 | | '''O-step''' || 10 || 3% || 200 || 0 || 40 | ||
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=== Holes === | === Holes === | ||
Using patterned samples of 1 μm holes with 50 nm of Al<sub>2</sub>O<sub>3</sub>. After the tests, approximately 28nm of Al<sub>2</sub>O<sub>3</sub> were still intact. | Using patterned samples of 1 μm holes with 50 nm of Al<sub>2</sub>O<sub>3</sub>. After the tests, approximately 28nm of Al<sub>2</sub>O<sub>3</sub> were still intact. | ||
[[File:holes 17 e 10 um.png|200px|left|thumb|'''''17.6 μm holes profile.''''']] | |||
{| border="1" style="text-align: center; width: 900px; height: 200px" | {| border="1" style="text-align: center; width: 900px; height: 200px" | ||
|+ 1μm holes recipe from March 2022 | |+ 1μm holes recipe from March 2022 | ||
|- | |- | ||
|-style="background:LightGray; color:Black" | |-style="background:LightGray; color:Black" | ||
! | ! !! Time (s) !! Pressure !! O<sub>2</sub> flow (SCCM) !! SF<sub>6</sub> flow (SCCM) !! Platen power (W) !! Coil power (W) | ||
|- | |- | ||
| '''O-step''' || 10 || 220 mTorr || 200 || 0 || 40 || 0 | | '''O-step''' || 10 || 220 mTorr || 200 || 0 || 40 || 0 | ||