Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
| Line 31: | Line 31: | ||
| '''E<sub>2</sub>-step''' || 7 || 4% || 0 || 350 || 300 | | '''E<sub>2</sub>-step''' || 7 || 4% || 0 || 350 || 300 | ||
|} | |}* Pillars profile effect when varying the etch time. | ||
<br clear="all" /> | <br clear="all" /> | ||