Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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{| border="1" style="text-align: center; width: 900px; height: 200px" | {| border="1" style="text-align: center; width: 900px; height: 200px" | ||
|+ 1μm holes recipe from March 2022 | |+ 1μm holes recipe from March 2022 | ||
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|-style="background:LightGray; color:Black" | |-style="background:LightGray; color:Black" | ||
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| '''E<sub>2</sub>-step''' || 1-5 || 220 mTorr || 0 || 1200 || 1 || 2000 | | '''E<sub>2</sub>-step''' || 1-5 || 220 mTorr || 0 || 1200 || 1 || 2000 | ||
|} | |} * For #288 cycles, 120 min, the profile depth reaches 17.6 μm. For #144 cycles, 60 min, the profile depth reaches 10.1 μm. Width variation presented in the pictures. | ||
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